\begin{tikzpicture}[node distance=3.5cm] \node (I1) [process] { $I_0$ \vspace{-2ex} \begin{align*} S' &\rightarrow \cdot S \\ S &\rightarrow \cdot V = E \\ S &\rightarrow \cdot E \\ E &\rightarrow \cdot V \\ V &\rightarrow \cdot \text{id} \\ V &\rightarrow \cdot * \, E \end{align*} }; \node (I2) [process, above of=I1] { $I_1$ \vspace{-2ex} \begin{align*} S' &\rightarrow S \cdot \end{align*} }; \node (A) [left of=I2] { accept \vspace{-2ex} }; \node (I3) [process, right of=I2] { $I_2$ \vspace{-2ex} \begin{align*} S &\rightarrow V \cdot = E \\ E &\rightarrow V \cdot \end{align*} }; \node (I4) [process, right of=I3] { $I_3$ \vspace{-2ex} \begin{align*} S &\rightarrow V = \cdot E \\ E &\rightarrow \cdot V \\ V &\rightarrow \cdot \text{id} \\ V &\rightarrow \cdot * \, E \end{align*} }; \node (I5) [process, below=1cm of I3] { $I_4$ \vspace{-2ex} \begin{align*} S &\rightarrow E \cdot \end{align*} }; \node (I6) [process, below of=I1] { $I_5$ \vspace{-2ex} \begin{align*} V &\rightarrow * \cdot E \\ E &\rightarrow \cdot V \\ V &\rightarrow \cdot \text{id} \\ V &\rightarrow \cdot * \, E \end{align*} }; \node (I7) [process, below=1 cm of I5] { $I_6$ \vspace{-2ex} \begin{align*} V &\rightarrow \text{id} \cdot \end{align*} }; \node (I9) [process, right of=I4] { $I_8$ \vspace{-2ex} \begin{align*} S &\rightarrow V = E \cdot \end{align*} }; \node (I8) [process, below=1cm of I7] { $I_{7}$ \vspace{-2ex} \begin{align*} E &\rightarrow V \cdot \end{align*} }; \node (I10) [process, below=1cm of I8] { $I_{9}$ \vspace{-2ex} \begin{align*} V &\rightarrow * \, E \cdot \end{align*} }; \node (I11) [process, below of=I4] { $I_{10}$ \vspace{-2ex} \begin{align*} V &\rightarrow * \, \cdot E \\ E &\rightarrow \cdot V \\ V &\rightarrow \cdot \text{id} \\ V &\rightarrow \cdot * \, E \end{align*} }; \draw [arrow] (I2) -- node[anchor=south] {\$} (A); \draw [arrow] (I1) -- node[anchor=east] {S} (I2); \draw [arrow] (I1) -- node[anchor=east] {V} (I3); \draw [arrow] (I3) -- node[anchor=south] {=} (I4); \draw [arrow] (I1) -- node[anchor=south] {E} (I5); \draw [arrow] (I1) -- node[anchor=east] {*} (I6); \path (I6) edge [loop left] node {*} (I6); \path (I11) edge [loop right] node {*} (I11); \draw [arrow] (I4) -- node[anchor=south] {V} (I8); \draw [arrow] (I1) -- node[anchor=south] {id} (I7); \draw [arrow] (I4) -- node[anchor=south] {E} (I9); \draw [arrow] (I6) -- node[anchor=south] {E} (I10); \draw [arrow] (I6) -- node[anchor=south] {V} (I8); \draw [arrow] (I4) -- node[anchor=south] {id} (I7); \draw [arrow] (I4) -- node[anchor=east] {*} (I11); \draw [arrow] (I11) -- node[anchor=south] {E} (I10); \draw [arrow] (I11) -- node[anchor=south] {V} (I8); \draw [arrow] (I11) -- node[anchor=south] {id} (I7); \draw [arrow] (I6) -- node[anchor=south] {id} (I7); \end{tikzpicture}
\begin{tikzpicture}[node distance=3.6cm] \node (I1) [process] { $I_0$ \vspace{-2ex} \begin{align*} S' &\rightarrow \cdot S \, \$ && ? \\ S &\rightarrow \cdot V = E && \$ \\ S &\rightarrow \cdot E && \$ \\ E &\rightarrow \cdot V && \$\\ V &\rightarrow \cdot \text{id} &&\$, =\\ V &\rightarrow \cdot * \, E &&\$, = \end{align*} }; \node (I2) [process, above of=I1] { $I_1$ \vspace{-2ex} \begin{align*} S' &\rightarrow S \cdot \$ && ? \end{align*} }; \node (A) [left=1 cm of I2] { accept \vspace{-2ex} }; \node (I3) [process, right of=I2] { $I_2$ \vspace{-2ex} \begin{align*} S &\rightarrow V \cdot = E && \$ \\ E &\rightarrow V \cdot && \$ \end{align*} }; \node (I4) [process, right of=I3] { $I_3$ \vspace{-2ex} \begin{align*} S &\rightarrow V = \cdot E && \$ \\ E &\rightarrow \cdot V && \$ \\ V &\rightarrow \cdot \text{id} && \$ \\ V &\rightarrow \cdot * \, E && \$ \end{align*} }; \node (I5) [process, below=1cm of I3] { $I_4$ \vspace{-2ex} \begin{align*} S &\rightarrow E \cdot && \$ \end{align*} }; \node (I6) [process, below of=I1] { $I_5$ \vspace{-2ex} \begin{align*} V &\rightarrow * \cdot E && \$, = \\ E &\rightarrow \cdot V && \$, = \\ V &\rightarrow \cdot \text{id} && \$, =\\ V &\rightarrow \cdot * \, E && \$, = \end{align*} }; \node (I7) [process, below=1 cm of I5] { $I_6$ \vspace{-2ex} \begin{align*} V &\rightarrow \text{id} \cdot && \$, = \end{align*} }; \node (I9) [process, right of=I4] { $I_8$ \vspace{-2ex} \begin{align*} S &\rightarrow V = E \cdot && \$ \end{align*} }; \node (I8) [process, below=1cm of I7] { $I_{7}$ \vspace{-2ex} \begin{align*} E &\rightarrow V \cdot && \$, = \end{align*} }; \node (I10) [process, below=1cm of I8] { $I_{9}$ \vspace{-2ex} \begin{align*} V &\rightarrow * \, E \cdot && \$, = \end{align*} }; \node (I11) [process, below of=I4] { $I_{10}$ \vspace{-2ex} \begin{align*} V &\rightarrow * \, \cdot E && \$ \\ E &\rightarrow \cdot V && \$\\ V &\rightarrow \cdot \text{id} && \$\\ V &\rightarrow \cdot * \, E && \$ \end{align*} }; \node (I12) [process, below=0.7cm of I9] { $I_{11}$ \vspace{-2ex} \begin{align*} V &\rightarrow \text{id} \cdot && \$ \end{align*} }; \node (I13) [process, below=1.2cm of I12] { $I_{12}$ \vspace{-2ex} \begin{align*} E &\rightarrow V \cdot && \$ \end{align*} }; \node (I14) [process, below=1cm of I13] { $I_{13}$ \vspace{-2ex} \begin{align*} V &\rightarrow * \, E \cdot && \$ \end{align*} }; \draw [arrow] (I2) -- node[anchor=south] {\$} (A); \draw [arrow] (I1) -- node[anchor=east] {S} (I2); \draw [arrow] (I1) -- node[anchor=east] {V} (I3); \draw [arrow] (I3) -- node[anchor=south] {=} (I4); \draw [arrow] (I1) -- node[anchor=south] {E} (I5); \draw [arrow] (I1) -- node[anchor=east] {*} (I6); \path (I6) edge [loop below] node {*} (I6); \path (I11) edge [loop below] node {*} (I11); \draw [arrow] (I4) -- node[anchor=north, pos=0.7] {V} (I13); \draw [arrow] (I1) -- node[anchor=south] {id} (I7); \draw [arrow] (I4) -- node[anchor=south] {E} (I9); \draw [arrow] (I6) -- node[anchor=south] {E} (I10); \draw [arrow] (I6) -- node[anchor=south] {V} (I8); \draw [arrow] (I4) -- node[anchor=south] {id} (I12); \draw [arrow] (I4) -- node[anchor=east] {*} (I11); \draw [arrow] (I11) -- node[anchor=south] {E} (I14); \draw [arrow] (I11) -- node[anchor=south] {V} (I13); \draw [arrow] (I11) -- node[anchor=east] {id} (I12); \draw [arrow] (I6) -- node[anchor=south] {id} (I7); \end{tikzpicture}
\begin{tikzpicture}[node distance=3.6cm] \node (I1) [process] { $I_0$ \vspace{-2ex} \begin{align*} S' &\rightarrow \cdot S \, \$ && ? \\ S &\rightarrow \cdot V = E && \$ \\ S &\rightarrow \cdot E && \$ \\ E &\rightarrow \cdot V && \$\\ V &\rightarrow \cdot \text{id} &&\$, =\\ V &\rightarrow \cdot * \, E &&\$, = \end{align*} }; \node (I2) [process, above of=I1] { $I_1$ \vspace{-2ex} \begin{align*} S' &\rightarrow S \cdot \$ && ? \end{align*} }; \node (A) [left=1 cm of I2] { accept \vspace{-2ex} }; \node (I3) [process, right of=I2] { $I_2$ \vspace{-2ex} \begin{align*} S &\rightarrow V \cdot = E && \$ \\ E &\rightarrow V \cdot && \$ \end{align*} }; \node (I4) [process, right of=I3] { $I_3$ \vspace{-2ex} \begin{align*} S &\rightarrow V = \cdot E && \$ \\ E &\rightarrow \cdot V && \$ \\ V &\rightarrow \cdot \text{id} && \$ \\ V &\rightarrow \cdot * \, E && \$ \end{align*} }; \node (I5) [process, below=1cm of I3] { $I_4$ \vspace{-2ex} \begin{align*} S &\rightarrow E \cdot && \$ \end{align*} }; \node (I6) [process, below of=I1] { $I_5$ \vspace{-2ex} \begin{align*} V &\rightarrow * \cdot E && \$, = \\ E &\rightarrow \cdot V && \$, = \\ V &\rightarrow \cdot \text{id} && \$, =\\ V &\rightarrow \cdot * \, E && \$, = \end{align*} }; \node (I7) [process, below=1 cm of I5] { $I_6$ \vspace{-2ex} \begin{align*} V &\rightarrow \text{id} \cdot && \$, = \end{align*} }; \node (I9) [process, right of=I4] { $I_8$ \vspace{-2ex} \begin{align*} S &\rightarrow V = E \cdot && \$ \end{align*} }; \node (I8) [process, below=1cm of I7] { $I_{7}$ \vspace{-2ex} \begin{align*} E &\rightarrow V \cdot && \$, = \end{align*} }; \node (I10) [process, below=1cm of I8] { $I_{9}$ \vspace{-2ex} \begin{align*} V &\rightarrow * \, E \cdot && \$, = \end{align*} }; \node (I11) [process, below of=I4] { $I_{10}$ \vspace{-2ex} \begin{align*} V &\rightarrow * \, \cdot E && \$ \\ E &\rightarrow \cdot V && \$\\ V &\rightarrow \cdot \text{id} && \$\\ V &\rightarrow \cdot * \, E && \$ \end{align*} }; \draw [arrow] (I2) -- node[anchor=south] {\$} (A); \draw [arrow] (I1) -- node[anchor=east] {S} (I2); \draw [arrow] (I1) -- node[anchor=east] {V} (I3); \draw [arrow] (I3) -- node[anchor=south] {=} (I4); \draw [arrow] (I1) -- node[anchor=south] {E} (I5); \draw [arrow] (I1) -- node[anchor=east] {*} (I6); \path (I6) edge [loop below] node {*} (I6); \path (I11) edge [loop below] node {*} (I11); \draw [arrow] (I4) -- node[anchor=east, pos=0.9] {V} (I8); \draw [arrow] (I1) -- node[anchor=south] {id} (I7); \draw [arrow] (I4) -- node[anchor=south] {E} (I9); \draw [arrow] (I6) -- node[anchor=south] {E} (I10); \draw [arrow] (I6) -- node[anchor=south] {V} (I8); \draw [arrow] (I4) -- node[anchor=east, pos=0.8] {id} (I7); \draw [arrow] (I4) -- node[anchor=east] {*} (I11); \draw [arrow] (I11) -- node[anchor=south, pos=0.3] {E} (I10); \draw [arrow] (I11) -- node[anchor=south] {V} (I8); \draw [arrow] (I11) -- node[anchor=south] {id} (I7); \draw [arrow] (I6) -- node[anchor=south] {id} (I7); \end{tikzpicture}